JPH0619335Y2 - 圧電素子の出力拡大機構 - Google Patents

圧電素子の出力拡大機構

Info

Publication number
JPH0619335Y2
JPH0619335Y2 JP1987072445U JP7244587U JPH0619335Y2 JP H0619335 Y2 JPH0619335 Y2 JP H0619335Y2 JP 1987072445 U JP1987072445 U JP 1987072445U JP 7244587 U JP7244587 U JP 7244587U JP H0619335 Y2 JPH0619335 Y2 JP H0619335Y2
Authority
JP
Japan
Prior art keywords
leaf spring
piezoelectric element
frame
displacement
spring portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987072445U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63182694U (en]
Inventor
豪 吉田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP1987072445U priority Critical patent/JPH0619335Y2/ja
Publication of JPS63182694U publication Critical patent/JPS63182694U/ja
Application granted granted Critical
Publication of JPH0619335Y2 publication Critical patent/JPH0619335Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Supply Devices, Intensifiers, Converters, And Telemotors (AREA)
JP1987072445U 1987-05-15 1987-05-15 圧電素子の出力拡大機構 Expired - Lifetime JPH0619335Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987072445U JPH0619335Y2 (ja) 1987-05-15 1987-05-15 圧電素子の出力拡大機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987072445U JPH0619335Y2 (ja) 1987-05-15 1987-05-15 圧電素子の出力拡大機構

Publications (2)

Publication Number Publication Date
JPS63182694U JPS63182694U (en]) 1988-11-24
JPH0619335Y2 true JPH0619335Y2 (ja) 1994-05-18

Family

ID=30915895

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987072445U Expired - Lifetime JPH0619335Y2 (ja) 1987-05-15 1987-05-15 圧電素子の出力拡大機構

Country Status (1)

Country Link
JP (1) JPH0619335Y2 (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4793893B2 (ja) * 2001-02-23 2011-10-12 Ｎｅｃトーキン株式会社 圧電発電ユニット
WO2011058874A1 (ja) * 2009-11-12 2011-05-19 コニカミノルタホールディングス株式会社 平行移動機構、干渉計および分光器

Also Published As

Publication number Publication date
JPS63182694U (en]) 1988-11-24

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